Productlogo of the direct laser writer PICOMASTER

When ultimate resolution matters

Picture of the direct laser writer PICOMASTER 200

The direct laser writers with ultimate resolution

PICOMASTER is a series of direct laser writers that work with a single laser beam to create high-resolution structures. The versatile, low-maintenance laser writer provides best-in-class resolution for features and grating periodicity. The user-friendly PICOMASTER series provides the perfect solution for your laser lithography challenges.

With features such as:

Single focused beam writing strategy
Down to 0.3 μm resolution
4096-level grayscale lithography
Proprietary autofocus even on challenging substrates
Up to 8” x 8” exposable area
Stitch-free exposure

PICOMASTER direct laser writers offer the perfect solution for your microfabrication needs.

Our customers Dr. Matthias Hagner and Emilia Schütz talk about the PICOMASTER at the University of Konstanz, Germany.

With 405 and 375 laser sources available, a resolution of 300 nm is guaranteed, so that PICOMASTER direct laser writers produce the highest resolution available in the market. Enhancing innovation strength for scientific and industrial purposes, these maskless direct laser writers unlock unique opportunities for R&D in photonic devices, microelectronics, MEMS, 3D lithography, optical variable devices (OVD), diffractive optical elements, and many more.

PICOMASTER is a PROPER tool for your lab:

PRECISION: Offering high-precision laser power control even for fine doses, autofocus even on challenging samples, and alignment accuracy

RESOLUTION: Enabling best-in-class resolution for both features and gratings, with periodicity down to sub-300 nm features

OPTIMIZATION: Can be optimized to any type of application with tabletop or standalone system selection, appropriate laser source wavelengths, and choice of writing modes

PROFILING: Providing ultimate grayscale capability up to 4096 levels without affecting exposure speed for best-in-class 2.5D resist profiling

EASE of USE: Easy sample handling supported by inhouse-designed aligning tools and a powerful user interface for convenience in working with most common file formats

REDUCED MAINTENANCE COST: Smooth, quick, and cost-efficient maintenance with maintenance-free motion platform and long-life optical module (10,000 hours), which is easy to replace with no need for a service visit

Questions?

If you have any questions or need more information, just get in touch!

Features

Resolution

< 300 nm

Grayscale levels

4096

Laser sources

405 / 375 nm

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Optimize the direct laser writer to your needs

PICOMASTER direct laser writer works on a configurable platform that can be optimized to your needs in line with your unique application or your specific lab conditions. PICOMASTER can be a tabletop or standalone system, can have different laser wavelengths for different types of resist, and can deliver different spot sizes for a wide range of applications. It can be combined with an environment stabilization unit if required.

Picture of the direct laser writer PICOMASTER 150

Picture of the direct laser writer PICOMASTER 100

Applications

Micro lens array made on a Si substrate with the direct laser writer PICOMASTER. Individual lens width is 20 µm at the bottom. Height of each lens 10 µm. Due to the perfect grayscale performance of the tool a smooth structure profile was achieved with high repeatability

SEM image shows the micro lens array made on a Si substrate with the direct laser writerPICOMASTER

SEM image of a zone plate manufactured on a thick resist. Resist depth is 60 µm and it was processed in one loop with the tool.

SEm image of a zone plate made with the direct laser writer PICOMASTER

High resolution features were exposed with minimum feature size well below specified 300 nm with PICOMASTER. This SEM image shows gratings like structures in a resist with individual feature sizes of 208 nm with perfectly shaped walls down to almost 900 nm depth.

SEM image of a grating with minimum feature size

Diffractive optical elements are essential parts for many application fields. This example shows the part of PLS hologram on a submicron level

SEM image showing a part of a PLS hologram

Photonics is an emerging application field in nanofabrication. SEM image shows a resonator with a sub-micron gap

SEM image of a resonator with a sub-micron gap fabricated with the diret leaser writer PICOMASTER

RF devices are used in wide variety of applications starting from security devices and ending in telecommunication services. The image shows an RF antenna made with the direct laser writer PICOMASTER with sub-micron resolution.

Photo of three people working in the Raith Service and Support Center

Raith Service - with you all the way

Where maskless lithography systems are concerned, a system’s unique capabilities and performance quality are certainly among the main drivers for decision-making. However, there are further factors to be taken into account, including efficient operation, continuous uptime, and subsequent reliable support over the whole system’s lifetime, which are always appreciated by our customers.

With a worldwide team of professional service engineers, Raith Service ensures that you can make the best use of your system. When you decide on a Raith system, support with the process setup, factory and on-site acceptances, and comprehensive on-site trainings are always provided with the systems. Moreover, complementary application support is available in different time zones.

Raith service contracts follow a modular scheme and can be configured to match your individual requirements and budget. Visit our Service site or get in touch with us to learn more.

Service