Industrial direct laser writer for up to 8” x 8” substrates. The PicoMaster 200 for maskless lithography is the most versatile system in its range and ideal for multiple purposes and large projects. Due to its compact stand-alone design the system requires minimum clean-room space and allows for quick and easy installation.
The laser direct writer has an integrated touchscreen controller and can be extended with an auto-loader and coating line to optimize machine utilization. The base frame is equipped with isolation mounts that filter out ground frequencies to ensure minimum vibrations in the system. An air-conditioning unit can be included and connected to the built-in HEPA-filter which allows for a clean cross-flow and ensures optimal system performance.
PicoMaster 200 has an integrated vacuum chuck and control PC. Both the scan and step axis incorporate high precision air bearings, resulting in extreme low mechanical errors and fast scan movement. The standard 300nm resolution provided by the 405nm write laser can be lowered fully automated by using the integrated numerical aperture switch. For more demanding applications a 375 nm write laser is optional.
PicoMaster 200 is used in a wide range of production environments worldwide, the systems provide a worry-free operation with minimum machine downtime. Holographic libraries are optional.
• Stand alone system with integrated vacuum pump and control PC
• Can be extended (auto-loader, coating line etc.)
• long life 405 nm diode
• Automatic switching between 3 write modes: 300, 500 and 900 nm
• Real-time laser controlled auto focus
• 4095 grayscale levels
• Area search with automatic marker recognition
• <0.3 µm top side alignment accuracy