+31 413 490708
info.laser@raith.com
+31 413 490708
info.laser@raith.com
All PicoMaster direct laser write systems are user-friendly tools with excellent stitching-free output. A unique starting point for your research and innovations and an indispensable quality in the process of mass production. The PicoMaster range guarantee any project to be efficient, smooth, and worry-free. Therefore the systems stimulate innovations to the fullest for a variety of applications.
Service
Installation of a PicoMaster optical module is quick & easy. The direct laser writer systems are equipped with an easily interchangeable compact optical module; machine downtime is reduced revolutionary. The systems require no regular maintenance such as lens changes. 4PICO Litho provides excellent service opportunities by remote customer support and local service engineers.
MicroMaster
Direct laser writing system for up to 4” x 4” substrates. This versatile table-top system with ultra-high precision components provides unprecedented finesse in creating 2.5D micro structures as small as 800 nm in photosensitive layers. Specs
PicoMaster 100
Direct laser writing system for up to 4” x 4” exposable area. This table-top system is a versatile UV laser writer with ultra-high precision components. The user-friendly PicoMaster maskless lithography tools are characterized by providing the highest degree of freedom to create micro structures as small as 300nm in photosensitive layers. Specs
PicoMaster 150
Versatile direct laser write system capable of processing 6’’6’’exposable area. The equipment requires minimum cleanroom space due to its compact stand-alone design. Installation is quick and easy. For more demanding applications a 375 nm laser is optional. Specs
PicoMaster 200
Industrial direct laser writer for up to 8” x 8” exposable area. This UV direct writer can be extended with an auto loader, coating line or other features. The PicoMaster 200 contains a touchscreen controller. Holographic libraries are optional. Specs
Contact us and find out how a PicoMaster system can help you.
| MicoMaster | PicoMaster 100 | PicoMaster 150 | PicoMaster 200 | ||
|---|---|---|---|---|---|
| Max substrate size | 4x4” | 4x4” | 6x6” | 8x8” | |
| Table top system | |||||
| Stand alone system | |||||
| Vacuum pump integrated | |||||
| Control PC integrated | |||||
| Touh screen controller | |||||
| Can be extended (auto loader, coating line, etc..) |
| MicoMaster | PicoMaster 100 | PicoMaster 150 | PicoMaster 200 | ||
|---|---|---|---|---|---|
| Scan axis with air bearing | |||||
| Step axis with air bearing | |||||
| Max scan axis speed | 200 mm/s | 200 mm/s | 400 mm/s | 400 mm/s | |
| Encoder resolution | 10 nm | 2.5 nm | 2 nm | 2 nm | |
| Wafer thickness | 0-10 mm | 0-10 mm | 0-10 mm | 0-10 mm | |
| Vacuum chuck |
| MicoMaster | PicoMaster 100 | PicoMaster 150 | PicoMaster 200 | ||
|---|---|---|---|---|---|
| Long life 405 nm diode laser | |||||
| 3 write modes | 0.8, 1.6 and 2.5μm | 0.3, 0.5 and 0.9μm | 0.3, 0.5 and 0.9μm | 0.3, 0.5 and 0.9μm | |
| Automatic switching between write modes | |||||
| Max 3 mW in the spot | |||||
| 4095 grayscale levels | |||||
| Data rate | 2.5 Mhz | 10 Mhz | 10 Mhz | 10 Mhz | |
| real-time laser controlled auto focus | |||||
| Optional: 375 nm laser source |
| MicoMaster | PicoMaster 100 | PicoMaster 150 | PicoMaster 200 | ||
|---|---|---|---|---|---|
| Monchrome 5.2MPixel camera | |||||
| 1µm per pixel | |||||
| Area search with automatic marker recognition | |||||
| Alignment accuracy | <0.5 µm | <0.3 µm | <0.3 µm | <0.3 µm |
| MicoMaster | PicoMaster 100 | PicoMaster 150 | PicoMaster 200 | ||
|---|---|---|---|---|---|
| Control PC with Windows 10 | |||||
| Bitmap and tiff support | |||||
| Gerber support for vector writing | |||||
| Native GDSII Support | |||||
| Control software included | |||||
| User access control | |||||
| Process recipes | |||||
| Activity database | |||||
| Optional: DXF to Gerber convertor | |||||
| Optional: Holographic libraries |
