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PicoMaster line of Laser Direct Writers: close to perfection

All PicoMaster direct laser write systems are user-friendly tools with excellent stitching-free output. A unique starting point for your research and innovations and an indispensable quality in the process of mass production. The PicoMaster range guarantee any project to be efficient, smooth, and worry-free. Therefore the systems stimulate innovations to the fullest for a variety of applications. 

Service

Installation of a PicoMaster optical module is quick & easy. The direct writer systems are equipped with an easily interchangeable compact optical module; machine downtime is reduced revolutionary. The systems require no regular maintenance such as lens changes. 4PICO Litho provides excellent service opportunities by remote customer support and local service engineers.

More benefits of the PicoMaster direct laser writer systems: click here.

 

MicroMaster

Direct laser writing system for up to 4” x 4” substrates. This versatile table-top system with ultra-high precision components provides unprecedented finesse in creating 2.5D micro structures as small as 800 nm in photosensitive layers. Specs

PicoMaster 100

Direct laser writing system for up to 4” x 4” substrates. This table-top system is a versatile UV laser writer with ultra-high precision components. The user-friendly PicoMaster tools are characterized by providing the highest degree of freedom to create micro structures as small as 300nm in photosensitive layers. Specs

PicoMaster 150

Versatile direct laser write system capable of processing 6’’6’’substrates. The equipment requires minimum cleanroom space due to its compact stand-alone design. Installation is quick and easy. For more demanding applications a 375 nm laser is optional. Specs

PicoMaster 200

Industrial direct laser writer for up to 8” x 8” substrates. This system can be extended with an auto loader, coating line or other features. The PicoMaster 200 contains a touchscreen controller. Holographic libraries are optional. Specs

PicoMaster 200 for Holographics

Industrial direct laser writer for up to 8” x 8” substrates. The PicoMaster 200 contains a touchscreen controller and is furnished with holographic libraries. This system can be extended with an auto loader, coating line or other features. Specs

 

Contact us and find out how a PicoMaster system can help you.

 

Product Comparison

Frame

MicoMaster PicoMaster 100 PicoMaster 150 PicoMaster 200 PicoMaster 200 for holographics
Max substrate size 4x4” 4x4” 6x6” 8x8” 8x8”
Table top system
Stand alone system
Vacuum pump integrated
Control PC integrated
Touh screen controller
Can be extended (auto loader, coating line, etc..)

Stage

MicoMaster PicoMaster 100 PicoMaster 150 PicoMaster 200 PicoMaster 200 for holographics
Scan axis with air bearing
Step axis with air bearing
Max scan axis speed 200 mm/s 200 mm/s 400 mm/s 400 mm/s 400 mm/s
Encoder resolution 10 nm 2.5 nm 2 nm 2 nm 2 nm
Wafer thickness 0-10 mm 0-10 mm 0-10 mm 0-10 mm 0-10 mm
Vacuum chuck

Optics

MicoMaster PicoMaster 100 PicoMaster 150 PicoMaster 200 PicoMaster 200 for holographics
Long life 405 nm diode laser
3 write modes 0.8, 1.6 and 2.5μm 0.3, 0.5 and 0.9μm 0.3, 0.5 and 0.9μm 0.3, 0.5 and 0.9μm 0.3, 0.5 and 0.9μm
Automatic switching between write modes
Max 3 mW in the spot
4095 grayscale levels
Data rate 2.5 Mhz 10 Mhz 10 Mhz 10 Mhz 10 Mhz
real-time laser controlled auto focus
Optional: 375 nm laser source

Top side alignment

MicoMaster PicoMaster 100 PicoMaster 150 PicoMaster 200 PicoMaster 200 for holographics
Monchrome 5.2MPixel camera
1µm per pixel
Area search with automatic marker recognition
Alignment accuracy <0.5 µm <0.3 µm <0.3 µm <0.3 µm <0.3 µm

Software

MicoMaster PicoMaster 100 PicoMaster 150 PicoMaster 200 PicoMaster 200 for holographics
Control PC with Windows 10
Bitmap and tiff support
Gerber support for vector writing
Native GDSII Support
Control software included
User access control
Process recipes
Activity database
Optional: DXF to Gerber convertor
Optional: Holographic libraries